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COMPANY
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Map
PRODUCTS
Hybrid Arc System
HCD icon plating System
DLC System
Other System
Turm Key Solusion/CS
Coating Servics
GALLERY
Products Gallery
CUSTOMER
Notice
Reference Room
ONLINE INQUIRY
ONLINE INQUIRY
Toggle navigation
COMPANY
CEO Greeting
History
Organization Chart
Certification
Map
PRODUCTS
Hybrid Arc System
HCD icon plating System
DLC System
Other System
Turm Key Solusion/CS
Coating Servics
GALLERY
Products Gallery
CUSTOMER
Notice
Reference Room
ONLINE INQUIRY
ONLINE INQUIRY
PRODUCTS
Hybrid Arc System
HCD ion plating System
DLC System
Other System
Turm Key Solusion/CS
Coating Servics
PRODUCTS
- Hybrid Arc System
- HCD ion plating System
- DLC System
- Other System
- Turm Key Solusion/CS
- Coating Servics
Hybrid Arc System
APIS with people, technology and customers
i40A
i70A
i90A
i120A
i150A
i300A
iPICO 80
Tool only
Production
Hobs
©ª80x180mm
360pcs
Mold
©ª220x300mm
75pcs
Piston
©ª220x1,560mm
15pcs
Characteristic
▸ 3rd generation Arc Source applied (Special Magnet Field applied, excellent target efficiency and improved illuminance)
▸ Chamber capacity: 1,150 x 1,180 x 850mmH (990L)
▸ Uniformity: ¥Õ700 x 470mmH
Applications