Hybrid Arc System HCD ion plating System DLC System Other System Turm Key Solusion/CS Coating Servics
Hybrid Arc System
APIS with people, technology and customers


Tool only
Production
Hobs ©ª80x180mm 360pcs
Mold ©ª220x300mm 75pcs
Piston ©ª220x1,560mm 15pcs
Characteristic
▸ 3rd generation Arc Source applied (Special Magnet Field applied, excellent target efficiency and improved illuminance)
▸ Chamber capacity: 1,150 x 1,180 x 850mmH (990L)
▸ Uniformity: ¥Õ700 x 470mmH
Applications