i40D |
i60FA |
i600S |
|
è¹ö»çÀÌÁî |
Á÷°æ 400 x 400H |
650x600x600 |
600x600x600 |
ÄÚÆýýºÅÛ |
ÀÏ¹Ý Arc |
Filtered Arc |
Sputtering |
À¯´ÏÆ÷¹ÌƼ |
135mm H x 3 axes |
130mm H x 6 axes |
300mm H x 6 axes |
MFC |
Ar, C2H2, N2 |
Ar, C2H2, N2 |
Ar, C2H2, N2 |
Ÿ°Ù |
5inch x 15mm t |
70mm dia x 12mm t |
16inch x 5 inch x12mmt |
¿¡Äª(Å©¸®´×¹æ½Ä) |
Glow Discharge |
Ion Beam (6KW, DC) |
Glow Discharge |
¹öÆÛÃþ |
Cr |
¾øÀ½ |
Cr |
ÄÚÆõβ² |
1um ÀÌÇÏ |
0.5um ÀÌÇÏ |
ÀÏ¹Ý µÎ²² |
ÄÚÆùڸ· Ư¡ |
smooth, Hard |
Very smooth, very hard |
Smooth, hard |