Hybrid Arc System HCD ion plating System DLC System Other System Turm Key Solusion/CS Coating Servics
DLC System
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i40D
i60FA
i600S
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Á÷°æ 400 x 400H
650x600x600
600x600x600
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ÀÏ¹Ý Arc
Filtered Arc
Sputtering
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135mm H x 3 axes
130mm H x 6 axes
300mm H x 6 axes
MFC
Ar, C2H2, N2
Ar, C2H2, N2
Ar, C2H2, N2
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5inch x 15mm t
70mm dia x 12mm t
16inch x 5 inch x12mmt
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Glow Discharge
Ion Beam (6KW, DC)
Glow Discharge
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Cr
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Cr
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1um ÀÌÇÏ
0.5um ÀÌÇÏ
ÀÏ¹Ý µÎ²²
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smooth, Hard
Very smooth, very hard
Smooth, hard
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▸ Double bending duct¸¦ ÀÌ¿ëÇÑ ÇÊÅ͸µ
▸ À̿°Ç(CDIS)¿¡ ÀÇÇÑ Å©¸®´×
▸ ¿ùµîÇÑ Ç¥¸éÁ¶µµ (Rt < substrate + 10nm)
▸ ÀÚµ¿È­ ½Ã½ºÅÛ ¹× µ¥ÀÌÅÍ ÀúÀå
▸ ½Ã½ºÅÛ »çÀÌÁî : 3.3m(L) x 2.2m(L) x 2.2m(H)
▸ ¿É¼Ç : DLC ¿¡Ã³ ½Ã½ºÅÛ
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